The effects of film thickness on the electrical, optical, and structural properties of cylindrical, rotating, magnetron-sputtered ITO films
| Autor: | Han-Ki Kim, Jae Ho Kim, Tae Yeon Seong, Hyeong Jin Seo, Kyung Jun Ahn, Kwun-Bum Chung, Hae Jun Seok |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Diffraction Materials science business.industry Plane (geometry) Scanning electron microscope High conductivity General Physics and Astronomy 02 engineering and technology Surfaces and Interfaces General Chemistry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Surfaces Coatings and Films Transmission electron microscopy 0103 physical sciences Electrode Cavity magnetron Optoelectronics 0210 nano-technology business |
| Zdroj: | Applied Surface Science. 440:1211-1218 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/j.apsusc.2018.01.318 |
| Popis: | We report the characteristics of Sn-doped In2O3 (ITO) films intended for use as transparent conducting electrodes; the films were prepared via a five-generation, in-line type, cylindrical, rotating magnetron sputtering (CRMS) system as a function of film thickness. By using a rotating cylindrical ITO target with high usage (∼80%), we prepared high conductivity, transparent ITO films on five-generation size glass. The effects of film thickness on the electrical, optical, morphological, and structural properties of CRMS-grown ITO films are investigated in detail to correlate the thickness and performance of ITO films. The preferred orientation changed from the (2 2 2) to the (4 0 0) plane with increasing thickness of ITO is attributed to the stability of the (4 0 0) plane against resputtering during the CRMS process. Based on X-ray diffraction, surface field emission scanning electron microscopy, and cross-sectional transmission electron microscopy, we suggest a possible mechanism to explain the preferred orientation and effects of film thickness on the performance of CRMS-grown ITO films. |
| Databáze: | OpenAIRE |
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