Summary Abstract: Studies of internal stresses and surface roughness of sputtered Be and BeB films

Autor:	C. H. Gillespie, E. J. Hsieh, C. W. Hatcher, E. L. Pierce
Rok vydání:	1988
Předmět:	Materials science Surface roughness Surfaces and Interfaces Composite material Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 6:1893-1894
ISSN:	1520-8559 0734-2101
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8c0c1dea745180d2fe16293cdd87814a https://doi.org/10.1116/1.575237 Zobrazit plný text záznamu