| Autor: |
Xu Chang, Jin Xie, Yi Chen, Jiaji Wang, Xiangfu Zong, Guowei He |
| Rok vydání: |
2001 |
| Předmět: |
|
| Zdroj: |
AIP Conference Proceedings. |
| ISSN: |
0094-243X |
| DOI: |
10.1063/1.1354397 |
| Popis: |
Today’s smaller geometry devices increasingly require the improved spatial resolution afforded by the transmission electron microscope (TEM) both in imaging analysis and in elemental analysis. The difficulties in sample preparation for TEM analysis have hindered its application, especially when specific locations are required in some cases. In this paper, two methods combined with focused ion beam (FIB) technique have been realized for TEM sample preparation. This makes the study of a 64M flash memory much easier and less time consuming. Some process details of the memory cell and advanced CMOS interconnection are also discussed. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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