Post-process methodology on-a CMOS chip to release an extracellular microelectrode array

Autor:	B. S. Soto-Cruz, F. Lopez-Huerta
Rok vydání:	2012
Předmět:	Materials science business.industry Process (computing) Multielectrode array Lab-on-a-chip Die (integrated circuit) law.invention Microelectrode Planar CMOS law Hardware_INTEGRATEDCIRCUITS Electronic engineering Optoelectronics business Microfabrication
Zdroj:	2012 8th International Caribbean Conference on Devices, Circuits and Systems (ICCDCS).
DOI:	10.1109/iccdcs.2012.6188950
Popis:	In the CMOS MEMS design the problems are centered on the sensor integration on-a-chip and its release post-process. The extracellular planar microelectrodes are straight form integrated due the layers CMOS possibilities, however the releasement of them must be done after the CMOS fabrication process. In this regard, the work presents the complete post-process methodology and the results of the technological post-process on 2.2mm×2.2mm square die. Preliminary results showed a) the viability of this post-process methodology and b) the on-chip functionality for extracellular in-vitro culture.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8bc8473b2c19c5913cac1b58397fa120 https://doi.org/10.1109/iccdcs.2012.6188950 Zobrazit plný text záznamu