Highly p-typed superlattices consist of undoped InAs and carbon-doped GaAs layers

Autor: Hiroshi Imanishi, Atushi Koizumi, Kazuo Uchida, Shinji Nozaki, Heisuke Kanaya
Rok vydání: 2013
Předmět:
Zdroj: Journal of Crystal Growth. 370:197-199
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2012.07.022
Popis: The strained-layer-superlattice (SLS) consisting of undoped InAs and carbon-doped GaAs (GaAs:C) layers were successfully grown on InP substrates by LP-MOVPE. The grown superlattice shows the p-type conductivity with a hole concentration of 1×10 19 cm −3 and Hall mobility of 70 cm 2 V −1 s −1 at room temperature. The resistivity is low enough to be used as an electrically equivalent highly p-type InGaAs base layer of an InP/InGaAs heterojunction bipolar transistor (HBT). The High-Angle Annular Dark Field Scanning Transmission Electron Microscopy (HAADF STEM) images reveal that the InAs/GaAs:C superlattice has an interface more abrupt than the undoped InAs/GaAs superlattice. It is attributed to the suppressed In diffusion from InAs to GaAs due to carbon doping in GaAs.
Databáze: OpenAIRE