Ball Surface Acoustic Wave Hydrogen Sensor with Widest Sensing Range and Fast Response

Autor: Noritaka Nakaso, Kazushi Yamanaka, S. Akao, K. Noguchi, Toshihiro Tsuji, T. Fukiura, N. Takeda, Y. Ebi, Hidekazu Tanaka, Takuji Abe, D. Sim, Tsuyoshi Mihara, Naoya Iwata
Rok vydání: 2007
Předmět:
Zdroj: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
DOI: 10.1109/sensor.2007.4300691
Popis: SAW(surface acoustic wave) excited on a spherical surface under a specific condition is naturally collimated, realizing ultra-multiple roundtrips along an equator of the sphere. The ball SAW hydrogen gas sensor is based on this newly discovered phenomenon, and uses a very thin Pd-Ni alloy sensitive film. The detection range for hydrogen gas was 10 ppm to 100% and the response time was less than Is for 3.0% hydrogen concentration in nitrogen gas, evaluated by using a newly developed digital quadrature detector (DQD).
Databáze: OpenAIRE