YBa2Cu3O7−δ thin films deposited by an ultrasonic nebulization and pyrolysis method
| Autor: | R. L. Henry, M. Osofsky, J. V. Marzik, W. J. Desisto |
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| Rok vydání: | 1991 |
| Předmět: |
Argon
Materials science Annealing (metallurgy) Scanning electron microscope Metals and Alloys Analytical chemistry chemistry.chemical_element Surfaces and Interfaces Yttrium Chemical vapor deposition Combustion chemical vapor deposition Surfaces Coatings and Films Electronic Optical and Magnetic Materials Carbon film chemistry Materials Chemistry Thin film |
| Zdroj: | Thin Solid Films. 206:128-131 |
| ISSN: | 0040-6090 |
| Popis: | High Tc superconducting films of YBa2Cu3O7−δ were deposited by a novel chemical vapor deposition procedure. 1-butanol solutions of the volatile yttrium, barium and copper derivatives of 2,2,6,6-tetramethyl-3,5-heptanedione were ultrasonically nebulized and pyrolyzed onto MgO substrates at 430 °C. The solutions were nebulized with “soft spray” ultrasonic nozzles operating at 60 and 120 kHz giving median droplet sizes of 19 and 10 μm respectively. Experimentally parameters affecting film composition are discussed. The as-deposited films were poorly crystalline. Annealing the films in flowing argon at 830 °C, was followed by a short anneal in O2 at 880 °C and slow cooling in O2. The films were metallic with Tc values as high as 80–81 K (R=0). Films were characterized by X-ray diffraction, optical and scanning electron microscopy, elastic backscattering and transport measurements. |
| Databáze: | OpenAIRE |
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