Microstructure and mechanical properties of nano-multilayer structured (AlCrMoTaTi)Nx coatings deposited by closed field unbalanced magnetron sputtering
Autor: | Tao Wang, Guochen Wang, Shouming Yu, Guojun Zhang |
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Rok vydání: | 2022 |
Předmět: | |
Zdroj: | Journal of Alloys and Compounds. 924:166592 |
ISSN: | 0925-8388 |
Databáze: | OpenAIRE |
Externí odkaz: |