Study of the pyrolysis of tertiarybutylhydrazine and GaN film growth

Autor:	Kangsa Pak, Yukichi Takamatsu, Takashi Yoshimura, Naoki Ohshima, Atsushi Ichige, Hiroo Yonezu, Shuichi Nishide
Rok vydání:	1998
Předmět:	Inorganic chemistry Analytical chemistry chemistry.chemical_element Condensed Matter Physics Epitaxy Nitrogen Decomposition Inorganic Chemistry chemistry Materials Chemistry Sapphire Metalorganic vapour phase epitaxy Thin film Pyrolysis Quadrupole mass analyzer
Zdroj:	Journal of Crystal Growth. :325-329
ISSN:	0022-0248
DOI:	10.1016/s0022-0248(98)00279-6
Popis:	Tertiarybutylhydrazine (TBHy) is one of the alternative nitrogen sources to ammonia. We investigated pyrolysis of TBHy using quadrupole mass spectrometer and grew GaN films on (0 0 0 1) sapphire substrates by low-pressure metal-organic vapor-phase epitaxy. TBHy drastically began to decompose from ∼400°C and was totally decomposed at ∼800°C. Single-crystalline layers of GaN with good surface morphology were obtained at the growth temperature of ∼930°C. The decomposition of the C4H9NH component from TBHy might be a dominant process for the film growth at relatively higher temperature.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8b29ef2fb58deaf9f1423b937e0a6042 https://doi.org/10.1016/s0022-0248(98)00279-6 Zobrazit plný text záznamu Full Text from ScienceDirect