TiO2 thin film based gas sensors for CO-detection
| Autor: | Karthik Tangirala Venkata Krishna, Heberto Gómez Pozos, María de la Luz Olvera Amador, Yuriy Kudriavtsev, Arturo Maldonado Álvarez |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Anatase Materials science Scanning electron microscope Analytical chemistry chemistry.chemical_element 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Amorphous solid chemistry.chemical_compound chemistry 0103 physical sciences Titanium dioxide Crystallite Electrical and Electronic Engineering Thin film 0210 nano-technology Titanium |
| Zdroj: | Journal of Materials Science: Materials in Electronics. 29:15829-15837 |
| ISSN: | 1573-482X 0957-4522 |
| Popis: | Pure titanium dioxide (TiO2) thin films were deposited and investigated as gas sensors for carbon monoxide (CO) detection. TiO2 thin films were deposited by ultrasonic spray pyrolysis technique, starting from titanium(IV) oxyacetilacetonate, onto soda-lime glass substrates. Structural, morphological, and compositional properties of the TiO2 films were obtained utilizing X-ray diffractometry, energy dispersive X-ray, scanning electron microscopy, and secondary ion mass spectroscopy techniques, respectively. Films deposited above 400 °C were polycrystalline, and its X-ray pattern fit well to the TiO2 anatase structure, and no other phases were detected, whereas films deposited at lower temperatures presented an amorphous structure. The sensitivity of the TiO2 films is analyzed by varying both thickness and deposition temperature. In addition, the sensor response was measured for CO concentrations from 1 to 300 ppm at different operation temperatures, 100, 200, and 300 °C. The highest sensitivity (~ 300) was obtained for TiO2 thin films deposited with the lowest film thickness, at a substrate temperature of 350 °C. The results obtained in this work show that the TiO2 films processed by ultrasonic spray pyrolysis exhibit very promising results for detection of CO. |
| Databáze: | OpenAIRE |
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