Evidence of ionic film deposition from single‐filament dielectric barrier discharges in Ar–HMDSO mixtures

Autor:	Gesa S. Perlick, Lars Bröcker, Claus-Peter Klages
Rok vydání:	2020
Předmět:	Hexamethyldisiloxane Ion deposition Materials science Polymers and Plastics Ionic bonding Dielectric Dielectric barrier discharge Condensed Matter Physics Single filament Plasma polymerization chemistry.chemical_compound Chemical engineering chemistry Deposition (chemistry)
Zdroj:	Plasma Processes and Polymers. 17:2000129
ISSN:	1612-8869 1612-8850
DOI:	10.1002/ppap.202000129
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8ad870bfbb0b72f1a98f7f3f2776c6e3 https://doi.org/10.1002/ppap.202000129 Zobrazit plný text záznamu Plný text