Depth Profiling by Means of X-Ray Fluorescence Analysis

Autor:	S. Rezai Afshar, R. Svagera, H. Ebel
Rok vydání:	1991
Předmět:	Materials science Analytical chemistry X-ray fluorescence Profiling (information science) General Medicine
Zdroj:	Advances in X-ray Analysis. 35:783-794
ISSN:	2631-3626 0376-0308
DOI:	10.1154/s0376030800012982
Popis:	Sherman described the excitation of characteristic radiations by primary x-rays and by secondary excitation. The derivation has been made assuming a homogeneous sample. Criss and Birks inverted the problem from the calculation of fluorescent countrates to the quantitative XFA by means of fundamental parameters. Theoretical and instrumental developments enabled a reduction of the sample area and led to small area XFA and imaging XFA sytems. Depth profiling by means of XFA is a further development. We continue the original concept of variable take-off angle technique for the determination of film thicknesses without reference samples and apply the variation of the incidence angle to depth profiling.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8aaea3381ef6b6aa95bd8698318d376f https://doi.org/10.1154/s0376030800012982 Zobrazit plný text záznamu