2.3.1 Benefits and Costs of Model-Based Fault Diagnosis for Semiconductor Manufacturing Equipment

Autor:	Jurryt Pietersma, Arjan J. C. van Gemund
Rok vydání:	2007
Předmět:	Cost reduction Semiconductor industry Engineering Risk analysis (engineering) business.industry Semiconductor device fabrication Operations management business Fault (power engineering)
Zdroj:	INCOSE International Symposium. 17:324-335
ISSN:	2334-5837
DOI:	10.1002/j.2334-5837.2007.tb02878.x
Popis:	Model-Based Diagnosis (MBD) is a promising solution for the fault diagnosis of complex systems. In this paper we review the benefits and costs of MBD. Our research is performed in cooperation with ASML which is the world's leading manufacturer of lithography systems for the semiconductor industry. We analyse the current way of working and the benefits that MBD offers. We present the results of practical modeling studies and discuss the benefits, costs, and cost reduction methods. We summarize the current research results and ongoing developments. Our results show that MBD has a high potential for diagnosis in a rapidly innovating industry. The fulfilment of this potential depends on the cost of modeling and the acceptance of MBD as part of broader pursuit for model-based systems engineering.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8aab90ce9de8d61195814720d95ef3f3 https://doi.org/10.1002/j.2334-5837.2007.tb02878.x Zobrazit plný text záznamu Plný text