A MEMS-based low pressure, light gas density and binary concentration sensor
| Autor: | Richard Thayre Smith, Douglas Ray Sparks, Jay Patel, N. Najafi |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Argon
Silicon Hydrogen Chemistry business.industry Metals and Alloys Analytical chemistry chemistry.chemical_element Condensed Matter Physics Hydrogen sensor Methane Surfaces Coatings and Films Electronic Optical and Magnetic Materials Sulfur hexafluoride chemistry.chemical_compound Semiconductor Carbon dioxide Physics::Chemical Physics Electrical and Electronic Engineering business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 171:159-162 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2011.08.011 |
| Popis: | A new MEMS-based density and binary gas concentration sensor is discussed. The micromachined sensor is made using a resonating silicon tube. Gas density and concentration test data over pressure for air, hydrogen, nitrogen, argon, methane, carbon dioxide, sulfur hexafluoride and gas mixtures are presented. The measurement of the density low pressure (101–400 kPa) hydrogen is demonstrated. Coupling binary gas concentration and density measurements of low pressure, light gases like hydrogen and methane opens up new sensing applications like fuel cells, energy management, chemical and semiconductor processing. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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