Outgassing Characteristics in Vacuum Chamber (I)

Autor: Kenya Akaishi
Rok vydání: 2003
Předmět:
Zdroj: Journal of Plasma and Fusion Research. 79:518-523
ISSN: 0918-7928
DOI: 10.1585/jspf.79.518
Popis: This article is a lecture on vacuum technique. The discussion matter is outgassing characteristics of water vapor and hydrogen in a vacuum chamber. The role of surface treatment of vacuum chamber is also mentioned from the view of reduction of outgassing rate.
Databáze: OpenAIRE