Influence of AlGaN n-type doping and AlN thickness on the two-dimensional electron gas density (ns) and resistance (R2DEG)

Autor:	C. Piotrowicz, B. Mohamad, N. Malbert, M.-A. Jaud, W. Vandendaele, M. Charles, R. Gwoziecki
Rok vydání:	2023
Předmět:	Materials Chemistry Electrical and Electronic Engineering Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Solid-State Electronics. 201:108594
ISSN:	0038-1101
DOI:	10.1016/j.sse.2023.108594
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8a2ad38b3024604391b0677d297bc246 https://doi.org/10.1016/j.sse.2023.108594 Zobrazit plný text záznamu Full Text from ScienceDirect