Post-annealing effect on the optical property of indium tin oxide sputtered films
| Autor: | Junghyun Park, Jin Kuk Yang, Sungkyun Park, Y.S. Lee, Bong Ko, Young Jun Chang, Jin-Seok Chung, Hyuk Kim, Jiwoong Kim, Miru Noh |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science business.industry Metallurgy Optical property General Physics and Astronomy chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Amorphous solid Indium tin oxide Post annealing chemistry Sputtering 0103 physical sciences Optoelectronics General Materials Science 0210 nano-technology Tin business Excimer laser annealing Indium |
| Zdroj: | Current Applied Physics. 16:1576-1580 |
| ISSN: | 1567-1739 |
| DOI: | 10.1016/j.cap.2016.09.010 |
| Popis: | By using the spectroscopic ellipsometric technique, we investigated the excimer laser annealing (ELA) effect on the electronic properties of indium tin oxides (ITO) films fabricated by the DC-sputtering method, which is the one of the most commonly known methods for the commercial ITO films. We found that while the ELA process was helpful for enhancing the electronic property of the sputtered films, the degree of the enhancement was not so sizable as the case of the sol-gel films. This result appeared to originate from the difference in the physical properties of the sol-gel and sputtered amorphous films. We also examined the thermal annealing (TA) effect on the sputtered amorphous films in various ambient conditions, and compared their physical properties with those of the TA sol-gel films. |
| Databáze: | OpenAIRE |
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