P-185L: Late-News Poster: Direct Patterning of Metal Electrodes forTFT-LCD Fabrication

Autor: In-Jae Chung, Yun-Ho Kook, Young-Ki Jung, Seong-Hee Nam, Youn-Gyoung Chang, In-Byeong Kang, Nam-Kook Kim, Soon-Sung Yoo, Tae-Hyoung Moon, Chang-Dong Kim
Rok vydání: 2009
Předmět:
Zdroj: SID Symposium Digest of Technical Papers. 40:1348
ISSN: 0097-966X
DOI: 10.1889/1.3256550
Popis: We have analyzed a metal direct printing method using roll printing technology for the low cost process in TFT-LCD fabrication. The silver metal electrodes patterned down to 3 μm in space width between lines were directly printed by this method. Very low line resistivity of 4.5 μΩ⋅cm was obtained, which is comparable to that of the AlNd metal alloy for the gate electrode of TFT-LCD. Furthermore, we evaluated the transfer characteristics of an a-Si:H TFT using directly printed silver material as a gate line.
Databáze: OpenAIRE