Generation of 10-11Pa extremely high vacuum by means of high purification of titanium molybdenum alloy geter source

Autor:	Kenji Odaka, Shinjiro Ueda
Rok vydání:	1991
Předmět:	Materials science Ultra-high vacuum Metallurgy chemistry.chemical_element Film temperature Condensed Matter Physics Surfaces Coatings and Films law.invention Outgassing Pressure measurement chemistry law Getter Shroud Electrical and Electronic Engineering Bake-out Titanium
Zdroj:	SHINKU. 34:29-36
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.34.29
Popis:	An extremely high vacuum of the order of 10-11Pa was achieved. The chamber was made of SUS304 stainless steel, electropolished and specially prebaked. After a bake out of 200°C, an outgassing rate of 2×10-11Pam3s-1m-2was obtained. The system was evacuated with a TMP. A Ti-15%Mo getter source was degassed for 70h at a temperature at which Ti evaporated at 1.3×10-7gs-1. At the same time, the system was baked at 250°C for 14.3h so that the titanium film temperature exceeded 320°C and the gases adsorbed on the film were well degassed. Then titanium was evaporated onto the water cooled shroud at a rate of 1.11.6×10-6 gs-1 for 68h. The pressure at room temperature under operation of the TMP reached at 3×10-10Pa. When the GV was closed and the shroud was filled with LN2, the pressure gauge indicated 7×10-11Pa.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::89b1384bf60f5be72c6ec1e110ae348c https://doi.org/10.3131/jvsj.34.29 Zobrazit plný text záznamu