Advanced large-area microwave plasmas for materials processing
| Autor: | Hideo Sugai, I. Ganachev |
|---|---|
| Rok vydání: | 2003 |
| Předmět: |
Materials processing
Materials science Surfaces and Interfaces General Chemistry Plasma Condensed Matter Physics Surface processing Engineering physics Ion source Surfaces Coatings and Films Planar Physics::Plasma Physics Physics::Space Physics Stress (linguistics) Materials Chemistry Electronic engineering Microwave |
| Zdroj: | Surface and Coatings Technology. :15-20 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/s0257-8972(03)00374-8 |
| Popis: | This is a review of the planar non-magnetized microwave plasma sources applied for surface processing. It introduces the basic features of these plasma sources and outlines the main phenomena necessary to understand their operation. The accent is on showing the areas where the application of such plasma sources is advantageous. Recent developments, in particular the corrugated-surface microwave plasma source, are presented. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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