Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers
| Autor: | Chisaki Takubo, K. Watanabe, Atsushi Isobe, Yasushi Tainaka, Yuki Furubayashi, Noriyuki Sakuma, Tomonori Sekiguchi, Takashi Oshima, Yudai Kamada |
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| Rok vydání: | 2018 |
| Předmět: |
Microelectromechanical systems
Materials science Noise spectral density Acoustics Capacitive sensing 020208 electrical & electronic engineering 010401 analytical chemistry Perforation (oil well) 02 engineering and technology Accelerometer 01 natural sciences Noise (electronics) 0104 chemical sciences Resonator Membrane 0202 electrical engineering electronic engineering information engineering |
| Zdroj: | 2018 IEEE SENSORS. |
| DOI: | 10.1109/icsens.2018.8589945 |
| Popis: | A method is presented for designing a thick membrane with several thousand perforations suitable for low-noise capacitive micro-electro-mechanical systems (MEMS) accelerometers. Although a membrane with two-step perforations shows good noise density performance, it is difficult to simulate mechanical noise using the conventional method because there are too many perforations, which makes the structure of the membrane complicated. The proposed method is based on the assumption that the number of perforations is infinite and that there are symmetric planes between the perforations. This assumption greatly reduces computational complexity because the simulation model is simplified in the region around a perforation. We fabricated MEMS resonators with a two-step perforated membrane and evaluated the accuracy of the simulation results. The measured Q values of the fabricated resonators were in good agreement with the calculated results. Using this design method, we optimized the structure of a membrane with two-step perforations and fabricated a capacitive MEMS accelerometer. It showed excellent low-noise density (less than 15 ng/Hz1/2). |
| Databáze: | OpenAIRE |
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