Reliability test for integrated Glass interposer
Autor: | Yu-Min Lin, Chia-Wen Fan, Chau-Jie Zhan, Wen-Wei Shen, Huan-Chun Fu, Su-Ching Chung, Su-Mei Chen, Chia-Wen Chiang, Jen-Chun Wang, Wei-Chung Lo, Hsiang-Hung Chang, Yuan-Chang Lee, Ching-Kuan Lee, Yung Jean Lu |
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Rok vydání: | 2016 |
Předmět: |
010302 applied physics
Fabrication Materials science Passivation Silicon business.industry chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology Chip 01 natural sciences Substrate (building) Reliability (semiconductor) chemistry 0103 physical sciences Electronic engineering Interposer Optoelectronics Electronics 0210 nano-technology business |
Zdroj: | 2016 International Conference on Electronics Packaging (ICEP). |
DOI: | 10.1109/icep.2016.7486780 |
Popis: | In this paper, we investigated the reliability test for Glass interposer. The test vehicle is assembled glass interposer with chip, BT substrate, and PCB. The structure of a glass interposer with two RDL on the front-side and one RDL on the backside had been evaluated and developed. Key technologies, including via fabrication, topside RDL formation, micro-bumping, temporary bonding, silicon and glass thinning and backside RDL formation, were developed and integrated to perform well. The BT substrate design and PCB for electrical characterization of reliability tests are included as well. The results indicate that the device with the glass interposer can be integrated and there is also data showing the feasibility of the glass interposer for electronics applications. |
Databáze: | OpenAIRE |
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