Influence of background gas pressure charging potential and target distance on the spot size ablated by single pulsed electron beam

Autor:	Enrique Jackson, Akira Ueda, W. E. Collins, Chase Cox, R. Aga, Richard Mu
Rok vydání:	2006
Předmět:	Materials science Fabrication business.industry medicine.medical_treatment Surfaces and Interfaces Electron Condensed Matter Physics Ablation Surfaces Coatings and Films Optics Gas pressure medicine Electron beam deposition Cathode ray business Power density
Zdroj:	Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 24:L11-L14
ISSN:	1520-8559 0734-2101
DOI:	10.1116/1.2360970
Popis:	The area of spot ablated by single pulsed electron beam has been measured as a function of pulsed electron deposition (PED) parameters. These parameters are background gas pressure, charging potential and target distance. A 50 nm thick film of silver on glass is used as ablation target in order to create a clear spot that can be measured. The spot area is found to reflect the power density of the pulsed electron beam and it can be varied by adjusting the PED parameters. These results are useful in the application of PED for material fabrication.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::897f0d92cfddfc9765131dd032f0f598 https://doi.org/10.1116/1.2360970 Zobrazit plný text záznamu