The Utility of Xe-Plasma FIB for Preparing Aluminum Alloy Specimens for MEMS-based In Situ Double-Tilt Heating Experiments

Autor:	M. F. Chisholm, Franklin S. Walden, B. D. Eckhart, R. Kelly, Amit Shyam, Wilbur C. Bigelow, Jonathan D. Poplawsky, Donovan N. Leonard, A. Stokes, Lawrence F. Allard, B. B. Larson
Rok vydání:	2019
Předmět:	In situ Microelectromechanical systems Materials science Tilt (optics) chemistry Aluminium Alloy engineering chemistry.chemical_element Plasma engineering.material Composite material Instrumentation
Zdroj:	Microscopy and Microanalysis. 25:1442-1443
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927619007943
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::897afdd45b2358db485ffb79d5164ec6 https://doi.org/10.1017/s1431927619007943 Zobrazit plný text záznamu