Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold
| Autor: | Masaharu Takahashi, Harutaka Mekaru, Manabu Yasui, Michiru Yamashita, Jun-ichi Uegaki, Tomoyuki Tsuchida |
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| Rok vydání: | 2008 |
| Předmět: |
Microlens
Fabrication Materials science Amorphous metal Alloy Substrate (electronics) engineering.material Condensed Matter Physics medicine.disease_cause Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Amorphous solid Mold engineering Forensic engineering medicine Electrical and Electronic Engineering Composite material Lithography |
| Zdroj: | Microelectronic Engineering. 85:873-876 |
| ISSN: | 0167-9317 |
| Popis: | We fabricated micro lenses on a Pyrex glass using thermal nanoimprint technology. The mold material employed to imprint on the Pyrex glass was a Ni/Ti/Si substrate electroless-plated with an amorphous Ni-P alloy. The fabrication of the mold involved high precision FIB processing. In this technique we used a newly developed low-cost mold for imprinting on Pyrex glass rather than using the commonly employed more expensive mold made of glass-like carbon material. Micro lens shaped concave curvatures of radii 12µm and 20µm were created on mold by an FIB system equipped with three-dimensional CAD software. The mold was then used for thermal imprinting on Pyrex glass substrate to fabricate lenses. The accuracy of Ni-P mold proved to be far superior to that of pure Ni mold. |
| Databáze: | OpenAIRE |
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