A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response
| Autor: | Mourad Elbelkacemi, Noureddine Zahid, Aziz Ettouhami |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Marketing
Materials science business.industry Strategy and Management Acoustics Capacitive sensing Electrical engineering Linearity Diaphragm (mechanical device) Pressure sensor law.invention Capacitor Transducer Boss law Media Technology General Materials Science Sensitivity (control systems) business |
| Zdroj: | Comptes Rendus Mécanique. 332:141-146 |
| ISSN: | 1631-0721 |
| DOI: | 10.1016/j.crme.2003.10.001 |
| Popis: | This paper describes a new capacitive structure of pressure sensor to increase simultaneously the sensitivity and the linearity of the transducer. This structure contains two capacitors which change in response to pressure, but in opposite senses. To increase even more the sensitivity of each capacitor, the pressure sensitive diaphragm carries a central boss. The optimal position and the length of the boss are also calculated. To cite this article: A. Ettouhami et al., C. R. Mecanique 332 (2004). |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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