Effect of silicon-based substrates and deposition type on sputtered AlN thin films: Physical & chemical properties and suitability for piezoelectric device integration

Autor:	M.A. Signore, L. Velardi, C. De Pascali, I. Kuznetsova, L. Blasi, F. Biscaglia, F. Quaranta, P. Siciliano, L. Francioso
Rok vydání:	2022
Předmět:	General Physics and Astronomy Surfaces and Interfaces General Chemistry Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	Applied Surface Science. 599:154017
ISSN:	0169-4332
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::8971bc5b8166dfc25fc9f3bb2fa71efd https://doi.org/10.1016/j.apsusc.2022.154017 Zobrazit plný text záznamu Full Text from ScienceDirect