Electrostatically driven overdense rf plasma source

Autor: S. Bernabei, R. W. Motley, W. M. Hooke, D. L. Jassby
Rok vydání: 1975
Předmět:
Zdroj: Journal of Applied Physics. 46:3286-3292
ISSN: 1089-7550
0021-8979
Popis: We describe a radio‐frequency plasma generator consisting of two collinear cylinders surrounding a magnetically confined plasma column, excited by up to 7 kW of power at 155 MHz. The source is capable of generating plasma densities of the order of mi/me times the critical density nc=meω2/4πe2. The plasma density, the efficiencies of plasma heating, and the ion and electron heating associated with this generator are described in detail.
Databáze: OpenAIRE