Electrostatically driven overdense rf plasma source
Autor: | S. Bernabei, R. W. Motley, W. M. Hooke, D. L. Jassby |
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Rok vydání: | 1975 |
Předmět: | |
Zdroj: | Journal of Applied Physics. 46:3286-3292 |
ISSN: | 1089-7550 0021-8979 |
Popis: | We describe a radio‐frequency plasma generator consisting of two collinear cylinders surrounding a magnetically confined plasma column, excited by up to 7 kW of power at 155 MHz. The source is capable of generating plasma densities of the order of mi/me times the critical density nc=meω2/4πe2. The plasma density, the efficiencies of plasma heating, and the ion and electron heating associated with this generator are described in detail. |
Databáze: | OpenAIRE |
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