| Popis: |
In this paper two methods for fabrication of released nickel comb-drive devices are given. Both methods are shown to be compatible with a standard CMOS metallization technology, thus making it possible to fabricate low-cost monolithic integrated sensors. Accelerometers, μ-resonators and tunneling unit sensors have been fabricated using these methods. The nickel resonators were characterized with respect to resonance frequency and quality factor. A quality factor of 536 was measured at atmospheric pressure at the resonance frequency 37.83 kHz. This is, to the knowledge of the authors, the highest quality factor measured in air for such a device. |
