| Autor: |
Joon-Chul Goh, Seungyu Park, Chen Hong, Chang-Woong Chu, Lee Jisu, Joon-hoo Choi, Sang-Pil Lee, Kyoungtae Park, Jung-Moo Huh, Jun-Hyung Souk, Chi-Woo Kim, Kunal Girotra |
| Rok vydání: |
2008 |
| Předmět: |
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| Zdroj: |
SID Symposium Digest of Technical Papers. 39:1289 |
| ISSN: |
0097-966X |
| DOI: |
10.1889/1.3069375 |
| Popis: |
This paper discusses development of uniform 14.1 inch AMOLED display using PECVD based microcrystalline silicon (mc-Si) TFTs. Microcrystalline silicon was deposited using conventional 13.56 MHz Plasma Enhanced Chemical Vapor Deposition (PECVD) with novel gas precursors. The mc-Si TFT's show a field effect mobility of around 1cm2/V.s and off-current less than 1pA. Electrical stress on mc-Si TFTs for a long time shows no significant threshold voltage shift indicating a stable TFT backplane. Significant uniformity improvements were made with novel TFT structure to give uniform AMOLED display. The deposition time for mc-Si TFTs was significantly reduced by using a thin mc-Si layer. Mc-Si TFT backplanes using conventional PECVD equipment offers significant cost advantages over other competing laser and non-laser polysilicon TFT technologies for AMOLEDs. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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