Analytical Modeling, Simulation, and Fabrication of a MEMS Rectangular Paddle Piezo-Resistive Micro-Cantilever-Based Wind Speed Sensor
| Autor: | Raju Patel, Vimal Kumar Agrawal, Kamaljit Rangra, Dharmendar Boolchandani |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Microelectromechanical systems
021110 strategic defence & security studies Resistive touchscreen Cantilever Materials science Fabrication Acoustics 010401 analytical chemistry 0211 other engineering and technologies 02 engineering and technology 01 natural sciences Wind speed 0104 chemical sciences Modeling and simulation Deflection (engineering) Paddle Electrical and Electronic Engineering Instrumentation |
| Zdroj: | IEEE Sensors Journal. 18:7392-7398 |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2018.2860779 |
| Popis: | In this paper, fabrication of a rectangular paddle micro-cantilever-based wind speed sensor along with its analytical model has been presented. The analytical model uses the closed-form solution to the bending stress caused by static deflection. Simulations of the device were done using finite-element analysis. The simulation, analytical, and experimental results have been compared for a better insight into the sensor behavior. Piezo-resistive deflection detection mechanism has been utilized to measure the wind speed. The experimental results show that the fabricated sensor can detect wind speed up to 29 ms−1 and has a sensitivity of 0.071 mV/ms−1 – V. |
| Databáze: | OpenAIRE |
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