Towards free-breathing spirometery-on-chip: Design, implementation and preliminary experimental results
| Autor: | Bahareh Gholamzadeh, Mohamad Sawan, Ebrahim Ghafar-Zadeh, M Matynia, Giancarlo Ayala-Charca, Sebastian Magierowski |
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| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Spirometry Cantilever Lung medicine.diagnostic_test Computer science Capacitive sensing Interface (computing) 020208 electrical & electronic engineering 010401 analytical chemistry Airflow Process (computing) 02 engineering and technology 01 natural sciences 0104 chemical sciences Data acquisition medicine.anatomical_structure 0202 electrical engineering electronic engineering information engineering Breathing medicine Electronic engineering |
| Zdroj: | ISCAS |
| Popis: | This paper presents a new approach towards the development of a free-breathing micro-spirometer system on a single chip for point-of-care (POC) diagnosis of lung diseases. In this paper, we take the first step by designing and implementing a cantilever array chip using a standard micro-electromechanical system (MEMS) process. Each cantilever beam is incorporated with capacitive electrodes for sensing the cantilever deflection. Herein we also put forward a custom-made readout interface circuit for the measurement of minute capacitive changes and for data acquisition purposes. Furthermore, we demonstrate and discuss the fabrication and characterization and spirometry results. Based on these results, the device is used for measuring the breathing airflow with a resolution better than 12 bits. These preliminary results reveal the functionality and applicability of the propose d system for POC diagnostics applications related to lung disease. |
| Databáze: | OpenAIRE |
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