Sputtered PZT pMUT with Bias-Tunable Electromechanical Coupling Coefficient for Air-coupled Ranging Applications

Autor:	J. Liu, D. S. W. Choong, D. J. Goh, S. Merugu, Q. X. Zhang, P. Chang, A. Leotti, H.-S. Tan, A. Hidayat, S. Ghosh, P. C. Ramegowda, D. S.-H. Chen, D. Giusti, F. Quaglia, C. Pedrini, L. Barabani, L. Castoldi, E. J. Ng, J. E.-Y. Lee
Rok vydání:	2022
Zdroj:	2022 IEEE International Ultrasonics Symposium (IUS).
DOI:	10.1109/ius54386.2022.9958698
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::88cf21e3d2c861229bc55e2c7051d00c https://doi.org/10.1109/ius54386.2022.9958698 Zobrazit plný text záznamu