Integrated circuit yield management and yield analysis: development and implementation
| Autor: | C.H. Stapper, R.J. Rosner |
|---|---|
| Rok vydání: | 1995 |
| Předmět: |
Engineering
business.industry Circuit design Yield (finance) Hardware_PERFORMANCEANDRELIABILITY Integrated circuit BiCMOS Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials law.invention Application-specific integrated circuit CMOS law Hardware_INTEGRATEDCIRCUITS Electronic engineering Yield management Electrical and Electronic Engineering Physical design business |
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. 8:95-102 |
| ISSN: | 1558-2345 0894-6507 |
| DOI: | 10.1109/66.388016 |
| Popis: | Integrated circuit manufacturing yields are not necessarily a function of chip area. Accurate yield analysis shows how the yield depends on circuit design and layout. By determining the probabilities of failure and critical areas for different defect types, it is possible to control and manage the yield of integrated circuits. This includes the manufacture of DRAM's, SRAM's, CMOS logic, ASIC's, and CMOS and biCMOS microprocessors. Examples explain the method of meeting yield objectives by setting targets for yield components. In addition, the yield management approach allows for a systematic allocation of resources. Required defect-density learning determines the contamination levels for clean rooms and process equipment. > |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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