Development of a hyperthermal oxygen-atom generator

Autor:	R. A. Outlaw, Gar B. Hoflund, Mark Davidson
Rok vydání:	1992
Předmět:	Orders of magnitude (temperature) Chemistry Surfaces and Interfaces General Chemistry Permeation Flange Condensed Matter Physics Surfaces Coatings and Films Generator (circuit theory) Flux (metallurgy) Membrane Desorption Materials Chemistry Current (fluid) Atomic physics
Zdroj:	Surface and Interface Analysis. 19:325-330
ISSN:	1096-9918 0142-2421
DOI:	10.1002/sia.740190161
Popis:	A source that is compact, durable and mounts on a standard ultrahigh vacuum (UHV) flange has been developed for the generation of hyperthermal oxygen atoms. In this source oxygen atoms permeate through an Ag membrane held at 500 o C and are then emitted toward the target from the vacuum side of the membrane by electro-stimulated desorption. The current prototype model generate useable O-atom fluxes of ∼ 10 12 atoms cm -2 s -1 , and future modifications should increase this flux by 1-3 orders of magnitude
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::88bda05614bfb018ba84b947461c6c8d https://doi.org/10.1002/sia.740190161 Zobrazit plný text záznamu Plný text