Topographic and electronic studies of wedge-shape surface defects on AlGaAs/GaAs films grown on Ge substrates

Autor: J. J. Boeckl, Q. Xu, Steven A. Ringel, Julia W. P. Hsu, John A. Carlin, R. M. Sieg
Rok vydání: 1999
Předmět:
Zdroj: Applied Physics Letters. 75:2111-2113
ISSN: 1077-3118
0003-6951
DOI: 10.1063/1.124933
Popis: Topographic changes and surface contact potential variations near defects on the surface of AlGaAs/GaAs double heterojunction structures grown on Ge substrates are studied using scanning force microscope and electrostatic force microscope. Comparison with transmission electron microscopy results indicates that these surface defects are directly related to stacking faults originated from the GaAs/Ge interface. The surface contact potential inhomogeneities near these defects are consistent with variations in Si dopant concentration.
Databáze: OpenAIRE