Capacitive silicon resonators with piezoresistive heat engines
| Autor: | Nguyen Van Nha, Nguyen Van Toan, Takahito Ono |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Silicon business.industry Capacitive sensing Electrical engineering chemistry.chemical_element Biasing 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Piezoresistive effect Resonator chemistry 0103 physical sciences Optoelectronics Insertion loss Voltage source 0210 nano-technology business Heat engine |
| Zdroj: | 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). |
| DOI: | 10.1109/transducers.2017.7994085 |
| Popis: | This work reports on capacitive silicon resonators with piezoresistive heat engines. The resonant body is divided into many parts which are connected each other by small piezoresistive beams to enhance the electromechanical transduction using a piezo-resistive heat engine effect. The capacitive silicon resonators with single (device #1) and multiple (device #2) piezoresistive beams have been designed and fabricated. With bias current (7 V voltage source) passing through the resonant body, the insertion loss of the fabricated devices is increased by 10 dB and 20 dB for device #1 and device #2, respectively, in comparison with the capacitive silicon resonators without the power to the piezoresistive heat engine. In addition, the motional resistance of device #1 and #2 are reduced by 70% and 90%, respectively. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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