| Autor: |
Thiraphat Vilaithong, Dheerawan Boonyawan, Fathom Vichaisirimongkol, Chome Thongleurm, Sakchai Aumkaew, Jonathan P. Green, Dusadee Suwannakachorn |
| Rok vydání: |
1994 |
| Předmět: |
|
| Zdroj: |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 89:354-356 |
| ISSN: |
0168-583X |
| DOI: |
10.1016/0168-583x(94)95199-3 |
| Popis: |
Nitrogen ion implantation is widely used to improve the wear and corrosion resistance of metals and alloys. Different kinds of ions, including metal and heavier ions can be used for this purpose. The proposed ion implanter as a 0°- and a 45°-beam line. The 0°-beam line has been installed and tested by using an RF source with an ion energy of about 140 keV. The nitrogen beam current is about 200 μA at the target position. The beam can be magnetically swept to cover a 10 cm × 10 cm target area. Preliminary tests with an ion dose of about 10 17 ions/cm 2 improved the hardness of stainless steel and aluminium samples. The 45°-beam line and the analyzing magnet are under construction. When this will be completed, the present RF ion source will be replaced by a Danfysik 910 ion source which can be used for producing metal and heavier ions. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
