High throughput characterization of the optical properties of compositionally graded combinatorial films
| Autor: | Debra L. Kaiser, Albert V. Davydov, Peter K. Schenck |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Materials science
Silicon business.industry General Physics and Astronomy chemistry.chemical_element Mineralogy Surfaces and Interfaces General Chemistry Dielectric Condensed Matter Physics Ferroelectricity Surfaces Coatings and Films Pulsed laser deposition chemistry.chemical_compound chemistry Sapphire Strontium titanate Optoelectronics Thin film business Refractive index |
| Zdroj: | Applied Surface Science. 223:200-205 |
| ISSN: | 0169-4332 |
| Popis: | Compositionally graded combinatorial films have been characterized by a high throughput automated spectroscopic reflectometer. The data from this instrument were used to map the thickness and index of refraction of the compositionally varying films. Combinatorial films produced by dual-beam, dual-target pulsed laser deposition and characterized with the reflectometer include the BaTiO3‐SrTiO3 system on silicon (dielectric and ferroelectric films). In addition, combinatorial Au/Ni electrical contacts on n-GaN/sapphire produced by electron-beam (e-beam) vaporization have been characterized with the spectroscopic reflectometer. The Au/Ni/n-GaN/sapphire structures were characterized both as-deposited and after annealing at 400 8C for 60 s in flowing argon. # 2003 Published by Elsevier B.V. PACS: 78.40; 07.60.H; 78.66 |
| Databáze: | OpenAIRE |
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