LTCC Fabrication for a Leaf Spring Vertical Actuator
| Autor: | Jennifer M. English, Craig H. Newborn, D.J. Coe |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Marketing
Fabrication Cantilever Materials science Silicon Fold (higher-order function) business.industry chemistry.chemical_element Condensed Matter Physics chemistry Leaf spring visual_art Materials Chemistry Ceramics and Composites visual_art.visual_art_medium Optoelectronics Ceramic business Actuator Voltage |
| Zdroj: | International Journal of Applied Ceramic Technology. 3:61-67 |
| ISSN: | 1744-7402 1546-542X |
| DOI: | 10.1111/j.1744-7402.2006.02062.x |
| Popis: | Ceramic laminate systems (LTCC) provide an alternative to silicon for three-dimensional actuator fabrication. The results of a LTCC vertical actuator study are presented. Based on a multi-fold leaf spring design, appearing as a series of cantilevers oriented in opposite directions, vertical motion is achieved via electrostatic actuation to compress and release the structure. Single and multi-fold proof-of-concept devices were modeled, fabricated, and tested. The device can vertically actuate 10-μm per fold under an applied voltage of 35 V. The actuation per fold may be controlled at 0.33-μm/V, over the range of 5-35 V. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|