Modeling of reactive sputtering of hot titanium target in nitrogen and oxygen

Autor:	V I Shapovalov, E A Minzhulina, A O Goncharov
Rok vydání:	2018
Předmět:	Arrhenius equation Materials science Evaporation chemistry.chemical_element Langmuir adsorption model Thermodynamics Thermionic emission Nitrogen Oxygen symbols.namesake chemistry Sputtering symbols Physics::Chemical Physics Titanium
Zdroj:	IOP Conference Series: Materials Science and Engineering. 387:012020
ISSN:	1757-899X 1757-8981
Popis:	A model for reactive sputtering of a hot titanium target in the environment of oxygen and nitrogen is considered. The target temperature is defined as a function of the ion current density. For the mathematical description of the process, the basic postulate of chemical kinetics including the equation of the Langmuir isotherm and the Arrhenius equation under nonisothermal conditions is used. In addition, the model takes into account thermionic emission and evaporation of the target surface.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::882a72a903a3374eb13c636645adf4a5 https://doi.org/10.1088/1757-899x/387/1/012020 Zobrazit plný text záznamu