Phase separation within NiSiN coatings during reactive HiPIMS discharges: A new pathway to grow NixSi nanocrystals composites at low temperature
| Autor: | P.-Y. Jouan, Tetsuhide Shimizu, Julien Keraudy, Ulf Helmersson, Robert D. Boyd |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Nanocomposite Nanostructure General Physics and Astronomy 02 engineering and technology Surfaces and Interfaces General Chemistry Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Microstructure 01 natural sciences Surfaces Coatings and Films Amorphous solid 0103 physical sciences Crystallite High-power impulse magnetron sputtering Thin film Composite material 0210 nano-technology |
| Zdroj: | Applied Surface Science. 454:148-156 |
| ISSN: | 0169-4332 |
| Popis: | The precise control of the growth nanostructured thin films at low temperature is critical for the continued development of microelectronic enabled devices. In this study, nanocomposite Ni-Si-N thin films were deposited at low temperature by reactive high-power impulse magnetron sputtering. A composite Ni-Si target (15 at.% Si) in combination with a Ar/N2 plasma were used to deposit films onto Si(0 0 1) substrates, without any additional substrate heating or any post-annealing. The films microstructure changes from a polycrystalline to nanocomposite structure when the nitrogen content exceeds 16 at.%. X-ray diffraction and (scanning) transmission electron microscopy analyses reveal that the microstructure consists of nanocrystals, NixSi (x > 1) 7–8 nm in size, embedded in an amorphous SiNx matrix. It is proposed that this nanostructure is formed at low temperatures due to the repeated-nucleation of NixSi nanocrystals, the growth of which is restricted by the formation of the SiNx phase. X-ray photoelectron spectroscopy revealed the trace presence of a ternary solid solution mainly induced by the diffusion of Ni into the SiNx matrix. Four-probe electrical measurements reveal all the deposited films are electrically conducting. |
| Databáze: | OpenAIRE |
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