New development of scanning-type microscope for two-dimensional hydrogen distribution using electron-stimulated desorption method

Autor: Masamichi Yoshimura, Ken'ichi Ishikawa, Kazuyuki Ueda
Rok vydání: 1999
Předmět:
Zdroj: Surface Science. :244-248
ISSN: 0039-6028
DOI: 10.1016/s0039-6028(99)00453-7
Popis: Time-of-flight type electron-stimulated desorption (TOF-ESD) spectroscopy enables us to study hydrogen on solid surfaces with high sensitivity. An analyzer for two-dimensional hydrogen distribution has been developed for TOF-ESD using a thermal field emission (TFE) gun for scanning electron microscopy. The lateral resolution of analysis is less than 1 μm at the primary-electron energy of 800 eV. A lower electron energy (around 200 eV) is preferable for inducing the ion desorption. We have improved the TFE gun working at the low primary-electron energy (above 300 eV) and show several hydrogen images as results of the improvement. The lattice pattern of a copper mesh is clearly resolved even at the energy of 300 eV. In this paper, we also discuss the topographic effects that appeared in scanning ESD images. Roughness of 1.2 μm height affects the ESD yield of H + ions mainly due to preferential desorption in the direction of the surface normal.
Databáze: OpenAIRE