Experimental Investigation at Relatively High Speed Scratching Induced by a Developed Diamond Tip

Autor:	Bo Ya Yuan, Zhi Feng Shi, Zhenyu Zhang, Si Ling Huang
Rok vydání:	2016
Předmět:	Normal force Materials science Silicon Scanning electron microscope business.industry Chip formation General Engineering chemistry.chemical_element Diamond engineering.material Focused ion beam Grinding Optics chemistry engineering Wafer Composite material business
Zdroj:	Advanced Materials Research. 1136:277-281
ISSN:	1662-8985
DOI:	10.4028/www.scientific.net/amr.1136.277
Popis:	A diamond tip with included angle of 90° and fillet radius of 45 nm is developed combining precision grinding and focused ion beam. Relatively high speed scratching at 8.4 m/s induced by the developed diamond tip is conducted on silicon (Si) (111) plane using an ultraprecision grinder. Width at the onset of chip formation on a Si wafer is 193 nm. Width and depth at the onset of crack formation are 1125 and 94 nm, respectively. Calculated normal forces at the onset of chip and crack formations are 424 μN and 14 mN, respectively, corresponding to the depth of cut is 44 and 466 nm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::87ad2d6de3890ffae372126735dc7b76 https://doi.org/10.4028/www.scientific.net/amr.1136.277 Zobrazit plný text záznamu