MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design
| Autor: | S.W. Godfrey, Kivanc Azgin, Tayfun Akin, Lorenzo Valdevit, Ebru Sagiroglu Topalli, Anna Torrents |
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| Rok vydání: | 2010 |
| Předmět: |
Optimal design
Microelectromechanical systems Engineering business.industry Mechanical Engineering Particle swarm optimization Load cell Finite element method Electronic Optical and Magnetic Materials law.invention Mechanics of Materials law Electronic engineering Vacuum level Electrical and Electronic Engineering Tuning fork business Voltage |
| Zdroj: | Journal of Micromechanics and Microengineering. 20:125004 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/20/12/125004 |
| Popis: | This paper presents the design, optimization and manufacturing of a novel micro-fabricated load cell based on a double-ended tuning fork. The device geometry and operating voltages are optimized for maximum force resolution and range, subject to a number of manufacturing and electromechanical constraints. All optimizations are enabled by analytical modeling (verified by selected finite elements analyses) coupled with an efficient C++ code based on the particle swarm optimization algorithm. This assessment indicates that force resolutions of ~0.5–10 nN are feasible in vacuum (~1–50 mTorr), with force ranges as large as 1 N. Importantly, the optimal design for vacuum operation is independent of the desired range, ensuring versatility. Experimental verifications on a sub-optimal device fabricated using silicon-on-glass technology demonstrate a resolution of ~23 nN at a vacuum level of ~50 mTorr. The device demonstrated in this article will be integrated in a hybrid micro-mechanical test frame for unprecedented combinations of force resolution and range, displacement resolution and range, optical (or SEM) access to the sample, versatility and cost. |
| Databáze: | OpenAIRE |
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