| Autor: |
Paul D. Atherton, Thomas R. Hicks, Malachy McConnell |
| Rok vydání: |
1996 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.259036 |
| Popis: |
Capacitance micrometry is a technique for measuring the relative displacement of two surfaces. As the spacing between the two surfaces changes so the capacitance changes. This short paper is a summary of recent measurements made to characterize and understand the linearity and scale factor.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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