XRD complex for controlling orientation and lattice elastic deformation in 12-inch wafers

Autor:	A.D. Zvonkov, A. A. Bolotokov, A.V. Lyutsau, Kumakhov, N.S. Ibraimov, S.V. Nikitina, A.V. Kotyolkin, A. E. Bulkin, M. V. Yudina, Yu.S. Ivanovsky, E. V. Likhoushina
Rok vydání:	2004
Předmět:	Crystallography Materials science Condensed matter physics Structural Biology Lattice (order) X-ray crystallography Wafer
Zdroj:	Acta Crystallographica Section A Foundations of Crystallography. 60:s248-s248
ISSN:	0108-7673
DOI:	10.1107/s0108767304095078
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::87383ee3e4917446f5952604702786bc https://doi.org/10.1107/s0108767304095078 Zobrazit plný text záznamu Plný text