P1H-5 Uniformity Optimization of the Electromechanical Coupling Coefficient in AlN Based Bulk Acoustic Wave Resonators

Autor:	L. Gabathuler, W. Huiskamp, F. Vanhelmont, R.C. Strijbos, R. Lanz, L. Senn
Rok vydání:	2007
Předmět:	Electromechanical coupling coefficient Materials science Yield (engineering) business.industry Electrical engineering Piezoelectricity Condensed Matter::Materials Science Resonator Quality (physics) Stack (abstract data type) Q factor Optoelectronics business Coupling coefficient of resonators
Zdroj:	2007 IEEE Ultrasonics Symposium Proceedings.
ISSN:	1051-0117
DOI:	10.1109/ultsym.2007.359
Popis:	High yield bulk acoustic wave (BAW) device manufacturing is a challenge: properties of all films in a complex film stack need to be optimized. The commonly used piezoelectric AIN is one of the central films. Key parameters for this film are best possible uniformity of following physical parameters: acoustic thickness, electromechanical coupling coefficient and mechanical quality factor. This paper investigates possible causes for observed non-uniformity of the coupling coefficient. Such non-uniformities reduce the production yield in BAW volume manufacturing.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::86efd26d1ab0e2ea879909fca5467d84 https://doi.org/10.1109/ultsym.2007.359 Zobrazit plný text záznamu