A mechanical study of W–N/W multilayers
| Autor: | L. Maillé, C. Sant, Pierre Garnier, P. Aubert |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Materials science
Analytical chemistry Mineralogy chemistry.chemical_element Heterojunction Surfaces and Interfaces General Chemistry Partial pressure Nanoindentation Condensed Matter Physics Microstructure Nitrogen Surfaces Coatings and Films chemistry Materials Chemistry Thin film Layer (electronics) Deposition (law) |
| Zdroj: | Surface and Coatings Technology. :483-487 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/j.surfcoat.2003.10.092 |
| Popis: | The microstructure of W, W–N single layers and W–N/W multilayers was related to their mechanical properties. For W–N single layer deposition, various nitrogen partial pressures ( P N 2 =10–50%) were investigated. A P N 2 =50% was chosen to deposit multilayers. The hardness values of the single layers and of the symmetric period multilayers as functions of period thickness (2–80 nm) were studied. Single layers have a hardness close to 14 and 18±1 GPa for W and W 2 N (with P N 2 =50%), respectively. For period thickness ranging between 5 and 80 nm, W–N/W multilayer hardness increases as layer spacing decreases. A hardness value 21.5±1.5 GPa was reached for 5 nm of period thickness (Λ). The first experimental results on asymmetric system are presented to determine the influence of W and W–N thickness in the multilayers. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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