The Thermodynamic Model for Vacuum Technology
| Autor: | Bui Thanh Phan, Vladimír Horák, Linh Do Duc |
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| Rok vydání: | 2020 |
| Předmět: | |
| Zdroj: | ECS Transactions. 99:381-389 |
| ISSN: | 1938-6737 1938-5862 |
| DOI: | 10.1149/09901.0381ecst |
| Popis: | The paper is focused on developing a mathematical model capable to describe thermodynamic processes connected with the vacuum technique. The model is based on the laws of energy and mass conservation, the air state behavior, and the principles of airflow, including the critical flow. The problem has been solved numerically by MATLAB. The results of the solution include the pressure evolution for a given pumping speed and the volume to be evacuated. Solutions are obtained for cases of airflow to the vacuum chamber through an inlet opening for three various diameters. The solutions are validated by comparing with experimental data. The presented model agrees with the experiment quite well. One very useful application is the determination of the relation between the diameter of the inlet opening and the pumping speed of the vacuum pump at the pressure steady state condition. This is an important knowledge for a simple and reliable quantitative pressure control in vacuum systems. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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